Recent trends of Excimer laser in PLD and other application

Abstract : Excimer lasers have a long and successful history in pulsed laser deposition where they are routinely operated at wavelengths of 193, 248 and 308 nm. Today, owing to the inherent processing advantages, namely stoichiometry preserving atomic layer growth and high material yield, pulsed laser deposition is one of the most promising routes toward high volume manufacturing of superconducting tapes. Enabled by concurring advances both in excimer laser ablation sources and vacuum deposition technology, large-scale multi-hundred Watt pulsed laser deposition off-the shelf solutions are available. 25 years after the first PLD experiments pulsed laser deposition has matured and is bound to become a widely-adopted, mainstream technology for industrial fabrication.